From uli at snf.stanford.edu Thu Feb 9 10:45:25 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 9 Feb 2012 10:45:25 -0800 Subject: Shutdown wbdiff SNF 2012-02-09 10:45:25: SDR water leak Message-ID: From maurice at snf.stanford.edu Mon Feb 13 16:36:06 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 13 Feb 2012 16:36:06 -0800 Subject: Problem wbdiff SNF 2012-02-13 16:36:05: very small drip Message-ID: dripping from city water connection to bench From uli at snf.stanford.edu Tue Feb 14 18:33:19 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 14 Feb 2012 18:33:19 -0800 Subject: Shutdown wbdiff SNF 2011-12-14 09:58:38: Message-ID: There are two new SRDs installed. The lower SDR is not ready yet for use. The upper SRD has one recipe, number 1, for 4 inch wafers only. The inserts for 3 and 6 inch wafers are not available right now. The instructions for the new SRDs are online (wiki) and there is a print out next to the tool. Load the wafers into the cassette, if you don't have 25 wafers it is recommended to space them evenly throughout the cassette, place the cassette into the SRD and press the green start button. 6 brand new 4 inch Teflon cassettes are available. From uli at snf.stanford.edu Tue Feb 14 18:33:38 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 14 Feb 2012 18:33:38 -0800 Subject: Shutdown wbdiff SNF 2012-02-09 10:45:25: SDR water leak Message-ID: fixed From uli at snf.stanford.edu Tue Feb 14 18:33:55 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 14 Feb 2012 18:33:55 -0800 Subject: Comment wbdiff SNF 2011-12-10 19:48:37: only one cassette in wbdiff Message-ID: From uli at snf.stanford.edu Tue Feb 14 18:35:15 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 14 Feb 2012 18:35:15 -0800 Subject: Comment wbdiff SNF 2011-10-28 18:07:44: SRD was in manual mode. Message-ID: to the archives From uli at snf.stanford.edu Tue Feb 14 18:35:31 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 14 Feb 2012 18:35:31 -0800 Subject: Comment wbdiff SNF 2011-10-25 15:40:54: Aug 2nd new SC1 Message-ID: to the archives From uli at snf.stanford.edu Tue Feb 14 18:36:01 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 14 Feb 2012 18:36:01 -0800 Subject: Comment wbdiff SNF 2011-10-06 12:03:40: resistivity issues update Message-ID: to the archives From uli at snf.stanford.edu Tue Feb 14 18:36:12 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 14 Feb 2012 18:36:12 -0800 Subject: Comment wbdiff SNF 2011-08-25 14:01:25: 4" SRD left in off mode Message-ID: to the archives From uli at snf.stanford.edu Tue Feb 14 18:37:09 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 14 Feb 2012 18:37:09 -0800 Subject: Problem wbdiff SNF 2012-02-14 18:37:09: lower SRD not ready for use Message-ID: From uli at snf.stanford.edu Tue Feb 14 18:38:28 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 14 Feb 2012 18:38:28 -0800 Subject: Comment wbdiff SNF 2012-02-14 18:38:27: new SRDs Message-ID: There are two new SRDs installed. The lower SDR is not ready yet for use. The upper SRD has one recipe, number 1, for 4 inch wafers only. The inserts for 3 and 6 inch wafers are not available right now. The instructions for the new SRDs are online (wiki) and there is a print out next to the tool. Load the wafers into the cassette, if you don't have 25 wafers it is recommended to space them evenly throughout the cassette, place the cassette into the SRD and press the green start button. 6 brand new 4 inch Teflon cassettes are available. From cmcg at snf.stanford.edu Wed Feb 29 13:06:08 2012 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Wed, 29 Feb 2012 13:06:08 -0800 Subject: Problem wbdiff SNF 2012-02-29 13:06:08: HCl liquid level detector bad Message-ID: Sporadically trips the heater with a low liq level fault even though the bath is full