From jhaydon at snf.stanford.edu Mon Jun 4 08:02:31 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 4 Jun 2012 08:02:31 -0700 Subject: Problem wbdiff SNF 2012-05-30 13:19:13: spin dryer won't dry Message-ID: most likely ran recipe A instead of 1 From grahamab at snf.stanford.edu Mon Jun 11 09:43:26 2012 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Mon, 11 Jun 2012 09:43:26 -0700 Subject: Problem wbdiff SNF 2012-06-11 09:43:25: SRD issues Message-ID: first try through SRD, hit ~13ohms at the end of step 2; stopped retried with same result. put cassette in dump rinser again while running the SRD empty. empty SRD took ~2min to hit 16ohms. next try with wafers, same result but with 14.9ohms. was going to try a new cassette, but none available. 5 diff boxes, only 3 cassettes; where did the others go. From lindaw at snf.stanford.edu Wed Jun 13 11:27:58 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 13 Jun 2012 11:27:58 -0700 Subject: Problem wbdiff SNF 2012-06-13 11:27:58: There are two empty diff cassettes boxes Message-ID: It appears that two wbdiff clean cassettes have gone missing from the bench without their boxes. I will hazard a guess that they are no longer clean, wherever they may be!!! From audet at snf.stanford.edu Mon Jun 18 14:22:38 2012 From: audet at snf.stanford.edu (audet at snf.stanford.edu) Date: Mon, 18 Jun 2012 14:22:38 -0700 Subject: Problem wbdiff SNF 2012-06-18 14:22:37: low level sensor Message-ID: Low level sensor on leftmost bath (H202:ammonium hydroxide) turns on intermittently, even when bath full, kicking off the heater. Sensor needs replacement? From kyunglok at snf.stanford.edu Mon Jun 18 17:30:54 2012 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Mon, 18 Jun 2012 17:30:54 -0700 Subject: Problem wbdiff SNF 2012-06-18 17:30:54: Low level sensor problem in leftmost bath Message-ID: It can't detect the right fluid level although the bath is full of chemical. I cannot use it. From kyunglok at snf.stanford.edu Mon Jun 18 17:32:14 2012 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Mon, 18 Jun 2012 17:32:14 -0700 Subject: Comment wbdiff SNF 2012-06-18 17:32:13: After reenble it, the low level sensor problem disappears Message-ID: Now it works. From grahamab at snf.stanford.edu Tue Jun 19 10:59:10 2012 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Tue, 19 Jun 2012 10:59:10 -0700 Subject: Problem wbdiff SNF 2012-06-19 10:59:10: SRD issues Message-ID: two consecutive users have had to stop the SRD and transfer to a new cassette to get their wafers through. From jhaydon at snf.stanford.edu Tue Jun 19 13:59:46 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 19 Jun 2012 13:59:46 -0700 Subject: Problem wbdiff SNF 2012-06-18 17:30:54: Low level sensor problem in leftmost bath Message-ID: reploaced level sensor From uli at snf.stanford.edu Wed Jun 20 15:59:24 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Wed, 20 Jun 2012 15:59:24 -0700 Subject: Problem wbdiff SNF 2012-05-17 18:23:22: lower SRD shutdown Message-ID: Lower SRD ready for use again. From uli at snf.stanford.edu Wed Jun 20 15:59:58 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Wed, 20 Jun 2012 15:59:58 -0700 Subject: Problem wbdiff SNF 2012-05-17 17:20:12: Bottom SRD not working properly Message-ID: Lower SRD ready for use again. From xuanwu at snf.stanford.edu Thu Jun 21 16:56:44 2012 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Thu, 21 Jun 2012 16:56:44 -0700 Subject: Problem wbdiff SNF 2012-06-21 16:56:44: SRD resistivity Message-ID: Wondering if it's a water supply issue. Multiple SRDs are having similar problems. From shott at snf.stanford.edu Sat Jun 23 07:27:03 2012 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 23 Jun 2012 07:27:03 -0700 Subject: Shutdown wbdiff SNF 2012-06-23 07:27:02: No scrubbed exhaust ... Message-ID: Shutting down tools will building scrubber is cleaned ... John and Mary From mtang at snf.stanford.edu Sat Jun 23 07:51:53 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sat, 23 Jun 2012 07:51:53 -0700 Subject: Shutdown wbdiff SNF 2012-06-23 07:27:02: No scrubbed exhaust ... Message-ID: From mtang at snf.stanford.edu Sat Jun 23 07:53:27 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sat, 23 Jun 2012 07:53:27 -0700 Subject: Comment wbdiff SNF 2012-06-23 07:53:26: Needs new chemicals Message-ID: Chemicals drained following scrubber exhaust maintenance. From jimkruger at snf.stanford.edu Tue Jun 26 10:59:40 2012 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 26 Jun 2012 10:59:40 -0700 Subject: Problem wbdiff SNF 2012-06-26 10:59:40: Short of teflon boats Message-ID: There are two empty boxes, I ma now using the only visible teflon boat. From amoini at snf.stanford.edu Wed Jun 27 16:00:28 2012 From: amoini at snf.stanford.edu (amoini at snf.stanford.edu) Date: Wed, 27 Jun 2012 16:00:28 -0700 Subject: Comment wbdiff SNF 2012-06-27 16:00:27: cassette doesn't fit in SRD Message-ID: one cassette does not fit in the SRD. I put it in between the blue and black wbdiff cases and put a note on it as well. From raisul at snf.stanford.edu Thu Jun 28 19:46:43 2012 From: raisul at snf.stanford.edu (raisul at snf.stanford.edu) Date: Thu, 28 Jun 2012 19:46:43 -0700 Subject: Comment wbdiff SNF 2012-06-28 19:46:43: Problem in the sensor of NH4OH/H2O2/H20 Wetbench Message-ID: During the run, several times low liq level sensor turned on. The temperature is shown to be out of range. Stopping and starting again solved the problem to some extent, but the problem is still there.