From dtlee at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: dtlee at snf.stanford.edu (dtlee at snf.stanford.edu) Date: Apr 14, 2000 Subject: Problem wbdiff: H2SO4 bath Message-ID: The H2SO4 bath cannot be aspirated. From gaul at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Apr 17, 2000 Subject: Problem Clear wbdiff: fixed loose aspirator line Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Apr 19, 2000 Subject: Problem Clear wbdiff: Duplicate problem Message-ID: From true at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: Jul 11, 2000 Subject: Problem wbdiff: Message-ID: right dump rinser dead From tui3 at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: tui3 at snf.stanford.edu (tui3 at snf.stanford.edu) Date: Jul 11, 2000 Subject: Problem wbdiff: rt dump rinser Message-ID: rt dump rinser is shutoff for some reason From amol at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: amol at snf.stanford.edu (amol at snf.stanford.edu) Date: Jul 12, 2000 Subject: Problem wbdiff: 4 cycles on Left dump rinser Message-ID: Left dump rinser works with only 4 cycles. With a setting of 6, it does not start. From beckwith at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Jul 12, 2000 Subject: Shutdown wbdiff: bench is alarming (?)...shutdown as per Len ( by phone) Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Jul 13, 2000 Subject: Shutdown Clear wbdiff: Right dump rinse controller is bad Message-ID: From vik at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: vik at snf.stanford.edu (vik at snf.stanford.edu) Date: Jul 13, 2000 Subject: Shutdown wbdiff: Message-ID: dump rinser (lef t and right) are malfunctioning. From gaul at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Jul 13, 2000 Subject: Shutdown Clear wbdiff: replaced fuse in transformer Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Jul 13, 2000 Subject: Problem Clear wbdiff: Works now Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Jul 13, 2000 Subject: Problem Clear wbdiff: Woks O.K. now Message-ID: From vik at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: vik at snf.stanford.edu (vik at snf.stanford.edu) Date: Jul 20, 2000 Subject: Problem wbdiff: Message-ID: Temperature sensor for Pirannah bath may be malfunctioning. Temperature is going up even when the heater is off. Temperature reading does not go below 50, and it's not letting me drain the bath. From latta at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 24, 2000 Subject: Problem wbdiff: Rt hand dump rinser still down...Makes it hard to clean more than 1 cassette at a time... grrrrr Message-ID: From kailash at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: kailash at snf.stanford.edu (kailash at snf.stanford.edu) Date: Sep 20, 2000 Subject: Shutdown wbdiff: HCl pot drains even when its not supposed to Message-ID: From jgarate at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: jgarate at snf.stanford.edu (jgarate at snf.stanford.edu) Date: Sep 20, 2000 Subject: Shutdown Clear wbdiff: The hot pot was fill with DI water for about three hours, did not see it drain at all. Message-ID: From amol at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: amol at snf.stanford.edu (amol at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff: 50:1 HF drain not workingDate: Nov 17, 2000 9:02:59 AM Message-ID: 50:1 HF is not draining. From seymour at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff: removed partial wafer covering drain ok nowDate: Nov 17, 2000 10:13:34 AM Message-ID: From jhaydon at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-08-05 22:18:42: HCl/H2O2 liq level sensor error Message-ID: <27717291.3.1344267674409.JavaMail.coral@shine> recrimped connector From jhaydon at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-08-04 09:33:04: liquid level sensor Message-ID: <3622076.4.1344267726920.JavaMail.coral@shine> recrimped level switch connector From hsyoon at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: hsyoon at snf.stanford.edu (hsyoon at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-08-06 13:26:44: low liquid level in HCl bath Message-ID: <27321041.18.1344284805296.JavaMail.coral@shine> keep turning off hard to maintain constant temperature From leixin at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: leixin at snf.stanford.edu (leixin at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-08-10 16:53:34: Broke one Si wafer Message-ID: <6474315.141.1344642815049.JavaMail.coral@shine> I broke one Si wafer. I cleaned up most of the pieces on top of the panel, but there were some pieces that fell inside the wet bench. From lofaolain at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: lofaolain at snf.stanford.edu (lofaolain at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-08-15 09:44:23: Low liquird errors Message-ID: <8747995.51.1345049064373.JavaMail.coral@shine> These occured occasionally and then passed From lofaolain at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: lofaolain at snf.stanford.edu (lofaolain at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-08-15 09:45:04: Spin dryer Message-ID: <29724345.52.1345049104773.JavaMail.coral@shine> The bottom spin dryer was drying a sample from yesterday From uli at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-08-10 16:53:34: Broke one Si wafer Message-ID: <1011618.55.1345062522096.JavaMail.coral@shine> cleaned From eldwin at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-08-15 15:30:00: low liquid sensor intermittent for HCl tank Message-ID: <32063405.58.1345069800425.JavaMail.coral@shine> low liquid level sensor comes on intermittently for HCl tank and turns off heater From cachang at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-08-16 09:05:50: low liquid level in second bath Message-ID: <3933242.70.1345133150276.JavaMail.coral@shine> cannot turn the heater on From mdickey at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-08-16 09:23:58: sensor Message-ID: <48079.71.1345134239851.JavaMail.coral@shine> level sensor is bad. Need to locate a replacement From mdickey at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-08-16 09:05:50: low liquid level in second bath Message-ID: <5901069.73.1345134763894.JavaMail.coral@shine> Replaced faulty level sensor From mdickey at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-08-15 15:30:00: low liquid sensor intermittent for HCl tank Message-ID: <29036670.74.1345134775014.JavaMail.coral@shine> Archived From uli at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-08-06 13:26:44: low liquid level in HCl bath Message-ID: <4369245.90.1345141692002.JavaMail.coral@shine> Level sensor has been replaced. From uli at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-07-30 13:25:15: middle liquid level sensor Message-ID: <26753825.91.1345141720281.JavaMail.coral@shine> Level sensor has been replaced. From uli at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-08-16 09:23:58: sensor Message-ID: <31697185.92.1345141744530.JavaMail.coral@shine> Level sensor has been replaced. From uli at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-08-15 09:44:23: Low liquird errors Message-ID: <11485291.93.1345141757658.JavaMail.coral@shine> Level sensor has been replaced. From uli at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-08-03 13:31:03: an empty cassette in the spin dryer Message-ID: <8872626.94.1345141780896.JavaMail.coral@shine> Cleaned. From uli at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-07-30 16:58:33: No problems with low liquid level Message-ID: <21412896.95.1345141796054.JavaMail.coral@shine> thanks From uli at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-07-30 14:51:12: bad connection cleaned contacts Message-ID: <15316485.96.1345141856593.JavaMail.coral@shine> Archived From uli at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-07-30 09:53:11: HCL/H2O2 Liquid level sensor unstable Message-ID: <26342879.97.1345141868722.JavaMail.coral@shine> Archived From uli at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-07-23 15:23:50: left bath heater Message-ID: <18243998.98.1345141890950.JavaMail.coral@shine> Archived From uli at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-07-09 16:28:48: low liq sensor Message-ID: <24829004.99.1345141901029.JavaMail.coral@shine> Archived From uli at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-06-27 16:00:27: cassette doesn't fit in SRD Message-ID: <32259003.100.1345143030943.JavaMail.coral@shine> Archived From jthomp at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: jthomp at snf.stanford.edu (jthomp at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-09-06 15:40:54: sensor problem on Hydrochloric acid bath Message-ID: <12092214.60.1346971254664.JavaMail.coral@shine> The low liquid level sensor on the H20/H202/HCL bath keeps coming on even when it's full, so the heater won't turn on. From lofaolain at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: lofaolain at snf.stanford.edu (lofaolain at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-09-07 10:59:59: Intermittent low liquid level alarms on the HCl bath Message-ID: <25620372.75.1347040800336.JavaMail.coral@shine> From ysyang88 at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: ysyang88 at snf.stanford.edu (ysyang88 at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-09-12 19:56:10: low liquid level alarm keeps on appearing for HCl bath Message-ID: <14009357.127.1347504970372.JavaMail.coral@shine> From popomoo at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-09-13 11:36:58: low liquid level alarm around 30~40C Message-ID: <22666639.140.1347561418977.JavaMail.coral@shine> I also had the problem of low liquid level alarm. After I changed the chemical, I turned on the heater. It was ok at first for a couple of minutes. Around 31C, the low liquid level (LLL) alarm was on, and the heater was stopped. After 1~2 minutes, the LLL alarm was off. I turned on the heater again. After about 1 minute, the LLL alarm was on, but the bath temperature increased a little bit. After 1~2 minutes, the LLL alarm was off. I turned on the heater again. The bath temperature increased a little bit. After about 1 minute, the LLL alarm was on. After 1~2 minutes, the LLL alarm was off. I turned on the heater again. The bath temperature increased a little bit more. So, I kept doing this stupid job for a while. And, when the bath temperature was over about 43C, the LLL alarm was off and it kept silent. Now, I'm using it happily. From qran at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: qran at snf.stanford.edu (qran at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-09-17 15:21:48: HCl bath has Low liquid level problem Message-ID: <3200426.8.1347920508531.JavaMail.coral@shine> as reported by previous user, the HCl bath shows a Low liquid level (LLL) problem in the temp range 30C to 40C, and heating can't processed unless you keep pushing the heat button. Also even if the temprature is in the right range, during the process, the LLL alarm rings again. From jhaydon at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-09-18 12:07:24: connections on relay board may have been loose Message-ID: <18086967.21.1347995244987.JavaMail.coral@shine> From jhaydon at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-09-18 12:09:27: ok to over ride me when you want to use bench Message-ID: <22854386.22.1347995368178.JavaMail.coral@shine> please let me know if it had faulted otherwise ok to use From eldwin at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-09-19 12:11:07: hcl low liquid sensor seems fixed! Message-ID: <2210017.36.1348081867462.JavaMail.coral@shine> was able to heat up the hcl bath with no problems last evening and this morning. thanks! From jhaydon at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-09-17 15:21:48: HCl bath has Low liquid level problem Message-ID: <5018853.4.1348586533550.JavaMail.coral@shine> no problems reported in over a week problem may be resolved From jhaydon at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-09-13 11:36:58: low liquid level alarm around 30~40C Message-ID: <29040730.5.1348586570931.JavaMail.coral@shine> no problems reported in over a week problem may be resolved From jhaydon at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-09-06 15:40:54: sensor problem on Hydrochloric acid bath Message-ID: <23273958.6.1348586645653.JavaMail.coral@shine> no problems reported in over a week since last fix problem may be resolved From leixin at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: leixin at snf.stanford.edu (leixin at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-10-03 19:16:30: One cassette cannot go through SRD Message-ID: <5466995.24.1349316990363.JavaMail.coral@shine> The resistivity couldn't go above 16. I put this cassette at the right most place with its back side facing the front. From uli at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-10-03 19:16:30: One cassette cannot go through SRD Message-ID: <14398951.44.1349388894401.JavaMail.coral@shine> cleaned From cachang at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-10-08 14:11:35: DI water spray gun low Message-ID: <31456120.4.1349730695280.JavaMail.coral@shine> DI water low From bchui at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-10-09 18:38:11: DI spray gun VERY LOW Message-ID: <21720560.33.1349833092092.JavaMail.coral@shine> almost impossible to fill up the tank now when changing chemicals From jaehlee at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-10-09 20:36:37: spray gun can be easily fixed by tightening the screw Message-ID: <5011566.34.1349840197347.JavaMail.coral@shine> fixed it! From jhaydon at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-10-09 18:38:11: DI spray gun VERY LOW Message-ID: <16926820.6.1350308773016.JavaMail.coral@shine> DI gun has ben fixed From jhaydon at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-10-08 14:11:35: DI water spray gun low Message-ID: <17267812.7.1350308788175.JavaMail.coral@shine> DI gun has been fixed From alsune at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-10-17 23:56:44: The first bath is malfunctioning Message-ID: <15772344.19.1350543405120.JavaMail.coral@shine> The display and the keys in the SC1 bath is malfunctioning. From uli at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-10-17 23:56:44: The first bath is malfunctioning Message-ID: <27775172.28.1350586266681.JavaMail.coral@shine> It works now. From popomoo at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-10-20 17:16:51: two broken Si pieces are inside the BOE 6:1 bath Message-ID: <30463851.80.1350778611641.JavaMail.coral@shine> I found that there were two broken (but quite big) pieces of Si in the BOE (6:1) bath. From raisul at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: raisul at snf.stanford.edu (raisul at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-10-22 20:46:32: my wafer broke during processing (not related to the wafer piece in the BOE bath reported by popomoo) Message-ID: <2290205.29.1350963994009.JavaMail.coral@shine> Today when I was carrying the cassette to HF bath the cassette accidentally collided with the cassette holder kept in the middle of the wet bench. Two of my wafers broke. I disposed the broken pieces and cleared the spot with water and N2 gun. This happened after popomoo reported two broken Si piece in BOE bath. I also saw those pieces. But those pieces were not mine. I removed the broken pieces that I caused. I am sorry to report this incident to let everyone know. From popomoo at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-10-23 18:19:38: one cassette is missing Message-ID: <1338166.56.1351041578678.JavaMail.coral@shine> There are five wafer boxes in wbdiff. However, one box does not have a cassette inside. I checked the wet bench thoroughly, but I could not find it around. It seems to me that someone took it out without putting it inside the box. I was concerned about the contamination issue. From haemmerl at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: haemmerl at snf.stanford.edu (haemmerl at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-10-25 11:11:19: Top SRD is slow to reach res setpoint Message-ID: <26449725.96.1351188679642.JavaMail.coral@shine> From mtan at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-10-25 12:51:20: noticed some broken pieces in 6:1 BOE Message-ID: <23273181.99.1351194681098.JavaMail.coral@shine> While stripping oxide for the tylanbpsg, I noticed that there are some borken silicon pieces that were left in the 6:1 BOE etch previously. From cbaxter at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-10-25 12:51:20: noticed some broken pieces in 6:1 BOE Message-ID: <26947503.1.1352046260717.JavaMail.coral@shine> Reemoved broken wafer chips.. From cbaxter at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-10-23 18:19:38: one cassette is missing Message-ID: <21169978.2.1352047145435.JavaMail.coral@shine> From minchieh at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: minchieh at snf.stanford.edu (minchieh at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-11-11 05:41:28: SRD issue Message-ID: <20614833.0.1352641289008.JavaMail.coral@shine> Tried both spin dryers; takes > 15 min at the end of the step 2 to reach the resistiviy ~ 15 to go to step 3 From jsegal at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: jsegal at snf.stanford.edu (jsegal at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-11-30 14:08:34: particles in BOE 6:1 pot after LTO dummy strip Message-ID: <8406178.12.1354313315087.JavaMail.coral@shine> From uli at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-11-30 14:08:34: particles in BOE 6:1 pot after LTO dummy strip Message-ID: <161592.21.1354326951156.JavaMail.coral@shine> Cleaned! From bchui at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-12-02 16:12:02: Plexiglass cover fell down Message-ID: <8920243.2.1354493523351.JavaMail.coral@shine> I walked by at 4pm sunday and saw that the left-side plexiglass cover had fallen down and lying on top of the two left-hand baths. I wasn't there when it happened and I didn't touch it or try to fix it; just reporting it so that staff can come take care of the problem on Monday. From jhaydon at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-12-02 16:12:02: Plexiglass cover fell down Message-ID: <14569291.7.1354549419829.JavaMail.coral@shine> Cover did not fall I must have forgotten to put it back when I finished with the badger install From lofaolain at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: lofaolain at snf.stanford.edu (lofaolain at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Comment wbdiff SNF 2012-12-04 13:24:08: SRDs working well Message-ID: <20865574.0.1354656248639.JavaMail.coral@shine> From lindaw at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-12-06 12:17:13: right hot pot low liquid level led lit when full Message-ID: <21197390.2.1354825033440.JavaMail.coral@shine> the low liquid level led on the right hot pot is lit wven though the pot is full. Cannot use timer or heater. From cbaxter at snf.stanford.edu Fri Jan 11 13:16:55 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:16:55 -0000 Subject: Problem wbdiff SNF 2012-12-06 12:17:13: right hot pot low liquid level led lit when full Message-ID: <27876598.22.1354936960890.JavaMail.coral@shine> Changed the low level siwtch.