From seymour at snf.stanford.edu Tue Apr 10 07:41:45 2001 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 10 Apr 2001 07:41:45 -0700 Subject: Spindryer leaks Message-ID: <3AD31BA9.1D30F97E@snf.stanford.edu> The door seal was leaking on the spin dryer because the seal was twisted in the door seal track. This might have been caused by the operator trying to open the door before the controller released the N2 to the door seal. Please wait until the door is released to open before trying to open the door From beckwith at snf.stanford.edu Tue Apr 10 13:05:10 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Tue, 10 Apr 2001 13:05:10 -0700 (PDT) Subject: Spindryer leaks In-Reply-To: <3AD31BA9.1D30F97E@snf.stanford.edu> Message-ID: Folks: Above the door, to the left, there is a series of lights: Heater (yellow)/Holding (green) Systen Power (red) Door Sealed (green) The Door Sealed light is on when the spin/dryer is running. There is a delay between the time the cassette stops spinning and the door un-seals. Do NOT attempt to open the door until the green Door Sealed light goes out. Then we won't have these problems. Thanks. On Tue, 10 Apr 2001, Ray Seymour wrote: > The door seal was leaking on the spin dryer because the seal was twisted > in the door seal track. This might have been caused by the operator > trying to open the door before the controller released the N2 to the > door seal. Please wait until the door is released to open before trying > to open the door From balaji at sunray.snffab.stanford.edu Tue Apr 10 16:29:26 2001 From: balaji at sunray.snffab.stanford.edu (Balaji Venkateshwaran) Date: Tue, 10 Apr 2001 16:29:26 -0700 (PDT) Subject: spin dryer Message-ID: <200104102329.QAA01434@sunray.snffab.stanford.edu> I am noticing a consistent problem with the wbdiff spin dryer - the heat does not turn on while drying. Consequently, I'm having to use much longer drying times to dry the wafers completely. From amol at stanford.edu Tue Apr 10 17:23:53 2001 From: amol at stanford.edu (Amol Joshi) Date: Tue, 10 Apr 2001 17:23:53 -0700 (PDT) Subject: wbdiff reserved 7-9am on 04/11 Message-ID: Hi, I have reserved wbdiff from 7-9am on Wednesday (04/11) for changing chemicals. - Amol From chion at stanford.edu Thu Apr 12 10:23:40 2001 From: chion at stanford.edu (Chi On Chui) Date: Thu, 12 Apr 2001 10:23:40 -0700 (PDT) Subject: Overnight reservation for changing chemicals Message-ID: Hi, We are going to do a critical cleaning for our experiment. So we need to change ALL chemicals in the diffusion wetbench by tomorrow morning at around 6:30am. Therefore, we have reserved the bench from 12:00am till 8am to allow enough time for the sulphuric acid tank to cool down. The bench will stay enabled by Amol overnight but please don't use it. Please turn the heaters off when you finish using the bench by tonight. If that would conflict your work, please call us at: Chi On (650)725-3612/(650)703-1910, or Amol (650)725-3608/(650)498-0955 Thanks for your cooperation. /Chi On and Amol Chi On Chui Research Assistant, Department of Electrical Engineering Center for Integrated Systems 014, Stanford University Stanford, CA 94305 Tel: (650)725-3612(o), (650)703-1910(c) URLs: http://www.stanford.edu/~chion From seymour at snf.stanford.edu Tue Apr 17 07:39:28 2001 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 17 Apr 2001 07:39:28 -0700 Subject: DI water meg ohm meter Message-ID: <3ADC55A0.CB529E49@snf.stanford.edu> The error message on the spin dryer DI monitor when reading Mohm-cm is normal as the probe is reading air not water when rinsing has stopped. Since DI water has a max value of 18.3 Mohm-cm, and air is much higher value the controller reads ERR to indicate Mohm-cm readings above that of the purest DI water. I checked out the spin dryer this morning and found the DI monitor turned off, and was told that was due to the unit not stopping the rinse cycle. If the DI monitor is off the rinse stops at the time setting, not the waste water resistivity setpoint of 16 Mohm-cm.This causes wafers not fully cleaned to be processed in the furnaces which may contaminate the furnace and any further users wafers. Please leave the controller on the AUTO setting and allow wafers to rinse until clean before drying.