Spin Rinser Dryer
jgarate at snf.stanford.edu
Wed Feb 21 13:35:00 PST 2001
The wet bench rinser dryer is not drying the wafers. The dry time has
been change to 340 instead of normal 240. This is only a temperately
fix. With this change the wafers come out dry, but the chamber stays
wet. This is okay as long as the wafers are dry.
The permanently fix is that the outside chamber is cover by two heat
cloth that one is not adhesive to the chamber, because the glue is to
old. Len has order some glue, and also he has order an extra heat cloth.
Sorry for the inconvenience!
Thanks, Jaime Garate
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