From beckwith at snf.stanford.edu Wed Jan 10 14:27:02 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Wed, 10 Jan 2001 14:27:02 -0800 (PST) Subject: problems with this bench Message-ID: Dick: Here is a list of everything that is not working on wbdiff. Most of this has been reported via the problem program in Coral, however, none of this has been fixed. wbdiff is a major piece of equipment in the lab, even though it is a lowly wet bench. 1. The timer on the H2O2 hot pot is set to zero; in order to time the clean step one of the second timers must be used. 2. The right dump rinser hasn't worked in months. 3. The left dump rinser is on it's way out also. The controller does not work. The only way you can rinse your wafers is to use the "Dump door" button, which only works by repeatedly pushing it until it engages. Previously there was no spray feature on this rinser; this is still true. In order to rinse the cassette handles they must be removed from the cassette and put in the bottom of the dump rinser. 4. The semi tool spin/rinse/dryer has no set point programmed in. If used in Auto mode it never stops rinsing because there is no set point to tell it to stop. People are using it in manual mode, which is a timed mode. #2 combined with #3 leads me to belive most people are not adequately rinsing their wafers. Wafers from this bench go in the clean tylans and lpcvd tubes. It would be nice if we knew for sure they were really clean! 5. The temp controller on the HCl hot pot does not seem to be controlling. The last person who used the bench did not turn off the heater, the temp RO was 85C, and climbing, when I arrived. The set point for this hot pot is 70C. For some strange reason the High Temp setting is 145C. Could you please fix this bench. Sharleen From beckwith at snf.stanford.edu Wed Jan 10 18:17:38 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Wed, 10 Jan 2001 18:17:38 -0800 Subject: wbdiff use tomorrow from ~10 am Message-ID: Folks: I have some special device wafers I must clean at wbdiff starting at 12:30 pm. I will need fresh chemicals in both hot pots. I would like to start cooling the hot pots as soon as Linda and Gladys are finished using the bench at ~10 am which means no one will be able to clean wafers there until after I am finished at ~1:30 pm. Please let me know if this is a problem for anyone. Sharleen From bgreene at stanford.edu Thu Jan 11 08:22:13 2001 From: bgreene at stanford.edu (Brian Joseph Greene) Date: Thu, 11 Jan 2001 08:22:13 -0800 (PST) Subject: wbdiff use tomorrow from ~10 am In-Reply-To: Message-ID: wbdiff users, Unfortunately, our wafers will not be ready for oxidation this afternoon, so Sharleen and I will not need the exclusive use of wbdiff this morning. Brian On Wed, 10 Jan 2001, Sharleen Beckwith wrote: > Folks: > > I have some special device wafers I must clean at wbdiff starting at > 12:30 pm. I will need fresh chemicals in both hot pots. I would like > to start cooling the hot pots as soon as Linda and Gladys are > finished using the bench at ~10 am which means no one will be able to > clean wafers there until after I am finished at ~1:30 pm. > > Please let me know if this is a problem for anyone. > > Sharleen > > From beckwith at snf.stanford.edu Wed Jan 17 17:57:22 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Wed, 17 Jan 2001 17:57:22 -0800 Subject: reservation of the wet bench starting at 9 am Message-ID: Folks: I know, people will want to be using the wet bench tomorrow, but we still have to do the super clean device run that was cancelled last week. Therefore, we would like to have use of the bench stating at 9:00 am to cool down the hot pots. I will be starting the clean at noon. When I am done the bench will be open for business as usual. Please let me know if this is a problem for anyone. Sharleen From jgarate at snf.stanford.edu Fri Jan 19 14:25:54 2001 From: jgarate at snf.stanford.edu (Jaime Garate) Date: Fri, 19 Jan 2001 14:25:54 -0800 Subject: Work in process Message-ID: <3A68BEF2.9846A6C2@snf.stanford.edu> Hi Users, On Monday, January 22nd I have schedule the wbdiff from 12:30pm to 4:30pm. Len and I will be working on this wet bench. If you need to use it please use it before 12:00pm or after 4:30pm. Sorry for the inconvenience! Thanks, Jaime Garate From booth at snf.stanford.edu Mon Jan 22 14:50:11 2001 From: booth at snf.stanford.edu (Len Booth) Date: Mon, 22 Jan 2001 14:50:11 -0800 Subject: Diffusion bench time now available. Message-ID: <3A6CB923.6EBD7498@snf.stanford.edu> Users - Jamie & I finished some maintenance tasks early this afternoon. We had reserved the diff bench until 4:30pm, but it is available now for use. Please note - we have reserved the diff bench for more maintenance time tomorrow morning, starting at 5:00am. Len