From evelyn at sunray.snffab.stanford.edu Mon Mar 19 09:42:43 2001 From: evelyn at sunray.snffab.stanford.edu (Evelyn Hugger) Date: Mon, 19 Mar 2001 09:42:43 -0800 (PST) Subject: wbdiff Message-ID: the wbdiff bench will be reserved until noon...sorry for the hang up From mtang at snf.stanford.edu Mon Mar 19 15:04:26 2001 From: mtang at snf.stanford.edu (Mary Tang) Date: Mon, 19 Mar 2001 15:04:26 -0800 Subject: Contamination incident Message-ID: <3AB6907A.F4F42732@snf.stanford.edu> Dear wbdiff users -- There was an incident this morning where wafers containing silicides and photoresist were inadvertently cleaned at wbdiff instead of wbsilicide. The person responsible immediately recognized the mistake, took responsibility, and is now decontaminating the bench under the supervision of staff members. We will be considering retraining on both stations. Because of the open-ended nature of doing research it is impossible to put in fool-proof measures to prevent this kind of incident from recurring. And mistakes happen. Instead, we ask that everyone be very careful about their processing and respond quickly to mistakes and accidents. We are all part of the community: labmembers who act conscientiously will always be welcome here. New qualification procedures will be in effect at these stations: wbnonmetal, wbdiff, and wbsilicide. Qualification procedures will be more standardized and consist of demonstration of knowledge and a written test. New operating procedures for these stations will be posted in the next day or two. -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From EvelynHug at aol.com Mon Mar 19 16:04:49 2001 From: EvelynHug at aol.com (EvelynHug at aol.com) Date: Mon, 19 Mar 2001 19:04:49 EST Subject: Contamination incident Message-ID: I don't know if wbdiff users who were going to use the bench for their process got my message I sent earlier on "pine".....if not I want to apoligize for hanging everyone's process up today.....I know how upsetting that is.....I feel like sticking my head in the ground and hiding (this is so embarrassing.......I sooooo sorry!) From beckwith at snf.stanford.edu Tue Mar 20 13:47:00 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Tue, 20 Mar 2001 13:47:00 -0800 (PST) Subject: Where are all the cassettes and handles? Message-ID: We seem to be down to 4 cassettes and 3 4" handles. If you are storing your wafers in these cassettes, please get a storage box and return the cleaning cassettes to the bench. I have no idea why someone would take the cassette handles...but if you have them please pre-diff clean them and bring them back. Thanks. Sharleen From hopcroft at snf.stanford.edu Thu Mar 22 17:10:44 2001 From: hopcroft at snf.stanford.edu (Matt Hopcroft) Date: Thu, 22 Mar 2001 17:10:44 -0800 (PST) Subject: wbdiff reservations Friday afternoon 1500-1700 Message-ID: I have reserved wbdiff on Friday 1500-1700 for two cleans. Its not a big deal, please let me know if you want to clean then also. Matt Hopcroft hopcroft at snf.stanford.edu 650.736.2380 From bgreene at stanford.edu Fri Mar 30 12:58:34 2001 From: bgreene at stanford.edu (Brian Joseph Greene) Date: Fri, 30 Mar 2001 12:58:34 -0800 (PST) Subject: WBDIFF reserved 22:00 - 02:00 Message-ID: I have reserved wbdiff from 10:00 tonight until 2:00 tomorrow morning, I will need exlusive use of the bench for some critical clean processing. If this is going to cause a problem for anyone, please let me know. Thanks, Brian _____________________________________________________________ Brian J. Greene Office: CIS-X 128X Applied Physics Dept, MC 4090 Phone: (650) 723-4194 ext 5 Stanford University Pager: (650) 354-9687 Stanford, CA 94305-4090 Fax: (650) 723-4659