Contamination

Mary Tang mtang at snf.stanford.edu
Fri Jul 5 17:25:51 PDT 2002


A labmember processed glass wafers (which contain 5-7% sodium and trace
metals) through both wbnonmetal (4 pm) and wbdiff (4:30 pm) on July 2.
The problem was not discovered until later.  Both benches were
decontaminated the evening of July 3.

Mary

--
Mary X. Tang, Ph.D.
National Nanofabrication Users' Network
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at snf.stanford.edu





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