From cmfaulkn at snf.stanford.edu Thu May 11 13:27:37 2006 From: cmfaulkn at snf.stanford.edu (Carl Faulkner) Date: Thu, 11 May 2006 13:27:37 -0700 (PDT) Subject: wafers left in LHS dump rinser Message-ID: If these are yours - please remove them. From pethe at elaine1.Stanford.EDU Sat May 13 18:27:44 2006 From: pethe at elaine1.Stanford.EDU (Abhijit Pethe) Date: Sat, 13 May 2006 18:27:44 -0700 (PDT) Subject: Toxic Gases shutdown Message-ID: Hi, We had an alarm at the SNF Saturday 4:00pm. The alarm is clear but the toxic gases are off and need to reset by staff. FYI. Thanks Abhijit From jhaydon at stanford.edu Thu May 25 16:46:15 2006 From: jhaydon at stanford.edu (Jim Haydon) Date: Thu, 25 May 2006 16:46:15 -0700 Subject: Shut down for dump rinser change Message-ID: <447641C7.2080003@stanford.edu> The Diffusion wet bench will be shut down from 5 /31 through 6/1 for the installation of new dump rinsers. For questions about options contact Nancy Latta. Jim H From rwoo at stanford.edu Sun May 28 09:03:06 2006 From: rwoo at stanford.edu (Raymond Woo) Date: Sun, 28 May 2006 09:03:06 -0700 Subject: wbdiff temperature settings Message-ID: <4479C9BA.4060204@stanford.edu> A word of warning to those who were planning on using wbdiff this weekend - the temperature settings for both hot pots has been set to 60C, and, as far as I can tell, can't be changed back to their normal settings by regular users. 60 degree piranha is obviously not sufficient to clean wafers, so until this problem is fixed I think the only way to do a diff clean is to change the chemicals and allow them to self heat. But the hot pot maximum drain temperature has also been changed to 50C. I accidentally turned on the heater first, and after waiting a full hour the temperature had only dropped from 60C to 55C so I gave up and went home. - Ray From sarves at stanford.edu Sun May 28 09:18:37 2006 From: sarves at stanford.edu (Sarves Verma) Date: Sun, 28 May 2006 09:18:37 -0700 Subject: wbdiff temperature settings In-Reply-To: <4479C9BA.4060204@stanford.edu> References: <4479C9BA.4060204@stanford.edu> Message-ID: <1148833117.4479cd5d5165a@webmail.stanford.edu> Well I worked yesterday morning and evening too, the sulphuric acid one's temperature was going upto 75C(and not 60C, the usual temp being 90C), however the higher limit of H2O2/HCl has been fixed to 60C (the normal being 70C) Also, the time settings have been changed to 0.2 seconds which also cant be changed. temperature fixed to one Quoting Raymond Woo : > A word of warning to those who were planning on using wbdiff this > weekend - the temperature settings for both hot pots has been set to > 60C, and, as far as I can tell, can't be changed back to their normal > settings by regular users. 60 degree piranha is obviously not sufficient > to clean wafers, so until this problem is fixed I think the only way to > do a diff clean is to change the chemicals and allow them to self heat. > > But the hot pot maximum drain temperature has also been changed to 50C. > I accidentally turned on the heater first, and after waiting a full hour > the temperature had only dropped from 60C to 55C so I gave up and went > home. > > - Ray > From shott at stanford.edu Sun May 28 09:59:19 2006 From: shott at stanford.edu (John D Shott) Date: Sun, 28 May 2006 09:59:19 -0700 Subject: Reset temperature settings .... Message-ID: <1148835559.4479d6e7e032d@webmail.stanford.edu> wbdiff users: I've reset the temperature and time of the H2SO4/H2O2 hotpot to 90C and 10 minutes and the HCl/H2O2 hotpot to 70C and 10 minutes. That may not be perfect .. but it should get you back on the air. The hot pots still have to be cooled to 50C for the drain to work. I'm not completely sure what that should be set to. Ho[efully,, this will at least get you back on the air. John If anyone knows what the drain temperature should be set at, let me know, and I'll try to get it changed ... From maurice at stanford.edu Tue May 30 13:50:05 2006 From: maurice at stanford.edu (Maurice Stevens) Date: Tue, 30 May 2006 13:50:05 -0700 Subject: Tomorrow and Thurs: wbdiff cleans at wbsilicide Message-ID: <447CAFFD.60506@stanford.edu> ?Wbdiff? is slated to be upgraded tomorrow starting at 6:00am. ?Wbsilicide? will serve as the backup until wbdiff is functional again on thur. Wbsilicide will be decontaminated this afternoon (~5:00pm) and will be unavailable for use as a semiclean station or for decontamination until wbdiff is back to general use. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278