From mpovinel at stanford.edu Fri Jul 11 14:30:47 2008 From: mpovinel at stanford.edu (Michelle Lynn Povinelli) Date: Fri, 11 Jul 2008 14:30:47 -0700 Subject: Anyone using wbdiff before Monday at 2pm? In-Reply-To: <48769D1E.8040501@stanford.edu> References: <20080709174656.st772ddvgg8gwkck@webmail.stanford.edu> <48769D1E.8040501@stanford.edu> Message-ID: <20080711143047.b7d75y32cso0oksw@webmail.stanford.edu> Is anyone using wbdiff between now and Monday at 2pm? I would like to find someone to shadow before the next scheduled training. Thanks, Michelle From maurice at stanford.edu Thu Jul 24 13:29:55 2008 From: maurice at stanford.edu (maurice stevens) Date: Thu, 24 Jul 2008 13:29:55 -0700 Subject: Spin dryer requires bench enabled Message-ID: <4888E643.1070106@stanford.edu> Now WBDiff must be enabled for the spin dryer to work. This modification was made to cutback on our N2 usage. The spin dryers require a high N2 purge. Now it flows high N2 flow only when the bench is enabled. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From eap at gloworm.Stanford.EDU Thu Jul 24 13:44:44 2008 From: eap at gloworm.Stanford.EDU (Eric Perozziello) Date: Thu, 24 Jul 2008 13:44:44 -0700 (PDT) Subject: Spin dryer requires bench enabled In-Reply-To: <4888E643.1070106@stanford.edu> Message-ID: Just curious, was any test done to verify that this won't impact the cleanliness of our clean device processes? IE: Was it done to the rigor of a typical (user) specmat request? If the SRD was designed to flow N2, it must have been done for a reason, much like the dump-rinsers are designed to flush periodically when idle. On Thu, 24 Jul 2008, maurice stevens wrote: > Now WBDiff must be enabled for the spin dryer to work. > This modification was made to cutback on our N2 usage. The spin dryers > require a high N2 purge. Now it flows high N2 flow only when the bench > is enabled. > > -- > maurice at stanford.edu > > Maurice Stevens > Stanford Nanofabrication Facility > CIS Room 142, Mail Code 4070 > Stanford, CA 94305 > P. (650)725-3660 > F. (650)725.6278 > >