Spin dryer requires bench enabled

maurice stevens maurice at stanford.edu
Thu Jul 24 13:29:55 PDT 2008

Now WBDiff must be enabled for the spin dryer to work.
This modification was made to cutback on our N2 usage.  The spin dryers 
require a high N2 purge.  Now it flows high N2 flow only when the bench 
is enabled.

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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