Spin dryer requires bench enabled
eap at gloworm.Stanford.EDU
Thu Jul 24 13:44:44 PDT 2008
Just curious, was any test done to verify that this won't impact
the cleanliness of our clean device processes? IE: Was it
done to the rigor of a typical (user) specmat request?
If the SRD was designed to flow N2, it must have been done for
a reason, much like the dump-rinsers are designed to flush
periodically when idle.
On Thu, 24 Jul 2008, maurice stevens wrote:
> Now WBDiff must be enabled for the spin dryer to work.
> This modification was made to cutback on our N2 usage. The spin dryers
> require a high N2 purge. Now it flows high N2 flow only when the bench
> is enabled.
> maurice at stanford.edu
> Maurice Stevens
> Stanford Nanofabrication Facility
> CIS Room 142, Mail Code 4070
> Stanford, CA 94305
> P. (650)725-3660
> F. (650)725.6278
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