Cleaning procedure for new and scribed wafers- PLEASE READ!

Robin King robinhmb at yahoo.com
Thu Apr 2 21:18:32 PDT 2009


Please do not put new Si wafers, or freshly-scribed wafers directly into wbdiff!!



The right side of the rinser/dryer is festooned with tape from new
wafer boxes, indicating people aren't following standard cleanliness
procedures.  Another lab user also told me he's seen people doing
this, and if there are 11 pieces of tape then it's probably happened a
hundred times.



New wafers and newly-scribed wafers MUST go into wbnonmetal first to remove outside contaminants.



PLEASE don't contaminate the cleanest wetbench, thanks.






      
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