LPCVD Coral Data Collection starting/Graphed data!!
eap at gloworm.Stanford.EDU
Wed May 27 17:46:01 PDT 2009
This functionality has been available at
for several years, for those who bothered to enter data.
On Wed, 27 May 2009, maurice stevens wrote:
> The Coral Team is almost ready to start data collection on the LPCVD
> tubes. They are telling us to expect it in the next day or so. Some of
> you have already seen the collection roll out on the tylan oxide tubes.
> But the graphs of the collected data will be new for everyone.
> The data collection will require you to enter some data when you log a
> LPCVD tool off of Coral. When disabling, a new pop up window will ask
> you to choose
> a process (most of you will choose: Deposition run). After making a
> choice on the first window, a second window will ask for process recipe
> (from a drop down), process time, temperature, ...
> All this data can be edited by the user after it is entered on the coral
> History Actions tab for that tool.
> All inputted data will be viewable in graph form by going to the new
> Process Actions tab in Coral and choosing the data to be graphed.
> If you are not a LPCVD user I apologize for bothering you with this note.
> maurice at stanford.edu
> Maurice Stevens
> Stanford Nanofabrication Facility
> CIS Room 142, Mail Code 4070
> Stanford, CA 94305
> P. (650)725-3660
> F. (650)725.6278
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