Selectively Etching Al over GaAs
jennyhu at stanford.edu
Mon Sep 1 22:59:54 PDT 2008
Hi Wet Bench GaAs Users,
I have patterned resist over 100nm Aluminum over GaAs, and I would like to
etch the aluminum without etching the GaAs beneath. It seems most chemicals
that etch Al (H3PO4, HCl, KOH, NaOH) also etch GaAs.
I tried etching using AL-11 etchant at 40C, but my GaAs surface was also
etched and the surface was roughened. The timing was very hard to control,
so I wasn't able to stop at exactly the Al/GaAs interface. I tried a lower
temperature, but I was still not able to remove my sample in time.
Does anyone have any experience with this? Any suggestions would also be
Thank you very much for your help.
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