Wet etching poly-Silicon

Balaji Venkateshwaran balaji at sunray.snffab.stanford.edu
Tue Apr 3 16:38:08 PDT 2001


Hi All,

I had a bad poly-Si run yesterday and I need to strip it and redeposit. The 
layer underneath is oxide. Does anyone know of a way to strip off the entire 
poly using a wet process ??

Thanks,
Balaji

(408) 887-2056





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