TMAH question

Onur Kilic okilic at stanford.edu
Thu Mar 17 15:18:29 PST 2005


Hi,

I am trying to etch Silicon <100> in TMAH with a surface quality as good as
possible.

I found in the literature that by adding a very small amount of either
Ammonium Persulfate, or a surfactant called NCW601A (Wako) improves the
surface quality drastically (I believe both are not available in SNF).

Does anyone has experience with these?

Or even better, do you know of a simple receipe that I can use. (Something
like a certain TMAH concentration and stirring etc., or adding IPA e.g.)???

Best,

Onur

-- 
Onur Kilic
PhD Candidate
Applied Physics
Stanford University
http://onurkilic.com






More information about the wbgen-ctb mailing list