Crystallization of 6:1 BOE

Soogine Chong sgchong at stanford.edu
Sun Apr 11 13:39:19 PDT 2010


Hi all, 

I used 6:1 BOE today and found sediments.  Has anyone seen this happen and know what the sediments are?  It says on the bottle that crystallization can occur.  I'm wondering what the effect of this would be on the oxide etch rate.

Please let me know if you know anything about this.

Thanks, 
Soogine.

-- 
Soogine Chong
Stanford University
PhD candidate in Electrical Engineering
e-mail: sgchong at stanford.edu
mobile: +1-650-804-8556




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