Si wet etching with 25% TMAH at room temperature

Donkoun Lee dlee76 at
Fri Oct 22 14:58:24 PDT 2010

Hi all:

I need to wet-etch a Si layer which thickness is around 50 nm. In order to
do this, I plan to use the 25% TMAH at room temperature. If anybody has any
experience with 25% TMAH at room temperature, may I share your experience,
such as wet etching procedure and etching rate.

Thank you.
Kind Regards,
Donkoun Lee

Donkoun Lee
Ph.D Candidate
Prof. Shan X. Wang's Group
Dept. of Materials Science & Engineering, Stanford University
McCullough Building, Rm 208, 476 Lomita Mall, Stanford, CA, 94305-4045

Office: (650)-723-2939
Fax: (650)-736-1984

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