From dlee76 at stanford.edu  Mon Aug  8 14:24:22 2011
From: dlee76 at stanford.edu (Donkoun Lee)
Date: Mon, 8 Aug 2011 14:24:22 -0700
Subject: Etching rate of SiO2 with BOE(1:20)
Message-ID: <C5208B4C-7F68-4755-AC9D-2A359267C59D@stanford.edu>

Hi all:

I am interested in the BOE wet etching process for SiO2. 
Most area of my samples are covered by PMMA which is a hard mask for the BOE wet etching process.
There are some openings (around 0.5 um x 10 um) where I want to wet-etch.

So, if anybody knows the etching rate of SiO2, can I share the information?

Thank you.
Kind Regards,
Donkoun Lee