From mmager at stanford.edu  Tue Aug 17 09:47:33 2004
From: mmager at stanford.edu (Morgan Mager)
Date: Tue, 17 Aug 2004 09:47:33 -0700
Subject: HF Vapor Etching
Message-ID: <004201c48479$e4ae8b90$f86b40ab@Morgan>

Hi,
    I am hoping to do an HF vapor etch of a thermally grown oxide, but I can't use the dedicated HF vapor setup because I have pieces and they are gold-contaminated. Uli told me that some people have been using wbgen to do this. Does anyone have experience they could share with me about concentrations/temperatures/other conditions used and the kind of etch rates and results you were seeing with those recipes? I would greatly appreciate any advice anyone can offer. Thanks.


-Morgan Mager
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From mmager at stanford.edu  Wed Aug 18 13:37:10 2004
From: mmager at stanford.edu (Morgan Douglas Mager)
Date: Wed, 18 Aug 2004 13:37:10 -0700
Subject: Reservation cancelled 15:00-18:00 today
Message-ID: <1092861430.4123bdf6c15ab@webmail.stanford.edu>

Sorry for the late notice