From ankurjn at stanford.edu  Thu Apr 21 11:04:08 2005
From: ankurjn at stanford.edu (Ankur Jain)
Date: Thu, 21 Apr 2005 11:04:08 -0700 (PDT)
Subject: does BOE attack Ni and/or Ti?
Message-ID: <Pine.LNX.4.44.0504211057020.11070-100000@firebird5.Stanford.EDU>

Hi wetbench users,
 I would like to etch a 1.5 micron thick thermal oxide film using 6:1 BOE.
However, I have a 2.0 um film of Nickel-Titanium alloy beneath the oxide
film. I am concerned about whether the BOE will etch the alloy film, and
if so, what would be the typical etch rate? If you've had any previous
experience that might help me, I'd appreciate getting to know about it
from you.
 By the way, just to make things clear, I plan on doing this processing on
wbgeneral, not wbmetal.


thanks!!

Ankur