From shott at snf.stanford.edu Sat Jun 7 11:43:21 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 7 Jun 2008 11:43:21 -0700 Subject: Problem wbgen-hpr SNF 2008-06-07 11:43:20: PRX127 fire at wbgen-hpr ..... Message-ID: Yes, that's correct: fire! This morning, probably near 10 a.m. Senyo found that his PRX127 was on fire. With the help of Cesar Baxter and Aaron Gibby, they were able to quickly extinguish it by covering the beaker. There is no visible damage that I can see .... but lucky that folks were near by and that the fire was extinguished quickly and without incident. Apparently, before the PRX127 was actually placed on the hot plate, the plate was turned on "pretty high". I'm guessing to 6 ... and then it was turned down and he put the chemicals on. What is the maximum temperature of chemicals that are used there? Is there ever a reason to turn the hot plate to 6? The easiest thing to do would be to make a new limit disk that only aallowed the temperature to be turned up to, for example, 4. It probably also makes sense to know what surface temperature we see at various settings. We should also explore alternative hot places. While it may be tricky to find one with remote controls and a 10" size, I know that there are hot plates with better ability to control maximum temperature of the plate. In any event, I think that we need to review our practices and engineering controls at our hot pots. Thanks, John From lindaw at snf.stanford.edu Mon Jun 9 11:36:54 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 9 Jun 2008 11:36:54 -0700 Subject: Comment wbgen-hpr SNF 2008-06-09 11:36:54: hot plate limit switch Message-ID: I would just like to chime in on the limit switch. I regularly run RCA cleans at wbgenhpr, and I need to set the limit switch to 6 to get my RCA bath up to 80-85C. If my temp is much lower than this, my wafers have poor fusion bonding, which is the process step that follows my RCA clean. I fear that setting the limit on the existing hot plate lower will be detrimental to my bonding process. Perhaps a digitally contolled hot plate would be the long term fix.