From mihirt at stanford.edu  Tue Jul 13 19:49:51 2010
From: mihirt at stanford.edu (Mihir Tendulkar)
Date: Tue, 13 Jul 2010 19:49:51 -0700 (PDT)
Subject: Aqua regia etch of Pt
Message-ID: <2110280746.402814.1279075791541.JavaMail.root@zm01.stanford.edu>

Wet bench users,

I'm attempting a wet etch of 50nm Pt / 5nm Ti films on SiO2.

My plan is to pattern the Pt with 955 (this is flexible), hardbake at 110 C, and then etch in dilute or full aqua regia. I'm concerned about photoresist delamination during the process, so I'm considering using 100% AR at 80 C.

Has anyone had experience etching Pt with a more dilute form of AR? What temperature did you use? Was photoresist delamination an issue?

Any insight would be appreciated. Thanks! 

-- 
Mihir Tendulkar
Applied Physics PhD Candidate
Nishi Group, Stanford University


From zappe at cmu.edu  Sat Jul 17 10:56:02 2010
From: zappe at cmu.edu (Stefan Zappe)
Date: Sat, 17 Jul 2010 13:56:02 -0400
Subject: Triton X
Message-ID: <e3e991c99cf60839620aa11a9d9ffd1b.squirrel@webmail.andrew.cmu.edu>

Hi,

there used to be Triton X 100 in the cleanroom.  When I looked through all
cabinets, I couldn't find it.

Do you know if there is still a bottle somewhere, or do you have your own
personal bottle in the lab?  I just need a couple of drops for an HF
release process.

Thanks,
Stefan



From vijayn at stanford.edu  Tue Jul 20 10:21:33 2010
From: vijayn at stanford.edu (Vijay Kris Narasimhan)
Date: Tue, 20 Jul 2010 10:21:33 -0700 (PDT)
Subject: Lost: Small Teflon Sample Dipper
In-Reply-To: <1909513537.117974.1279646301352.JavaMail.root@zm02.stanford.edu>
Message-ID: <1716937169.118083.1279646493079.JavaMail.root@zm02.stanford.edu>

Dear Labmembers,

I left a teflon sample dipper with my other labware to dry overnight.  It was a custom, personally owned piece of labware and should have been sitting with my other small beakers and graduated cylinders on the table next to wbgen2, across from wbgaas.  It is GaAs contaminated and not for general lab use.  I could not label it because it goes into my acid bath.

If you have seen it, could you please let me know?  There's a ziplock bag with my name on it sitting at that table.  Please either write me back by e-mail or drop it in there.

Cheers,

Vijay


From vijayn at stanford.edu  Tue Jul 20 10:35:09 2010
From: vijayn at stanford.edu (Vijay Kris Narasimhan)
Date: Tue, 20 Jul 2010 10:35:09 -0700 (PDT)
Subject: Lost: Small Teflon Sample Dipper
In-Reply-To: <1716937169.118083.1279646493079.JavaMail.root@zm02.stanford.edu>
Message-ID: <2085638955.118664.1279647309618.JavaMail.root@zm02.stanford.edu>

Found.  Thanks!

Vijay

----- Original Message -----
From: "Vijay Kris Narasimhan" <vijayn at stanford.edu>
To: wbgaas-hpl at snf.stanford.edu, wbgaas-hpr at snf.stanford.edu
Cc: wbgen-hpr at snf.stanford.edu, wb-ctb at snf.stanford.edu
Sent: Tuesday, July 20, 2010 10:21:33 AM
Subject: Lost: Small Teflon Sample Dipper

Dear Labmembers,

I left a teflon sample dipper with my other labware to dry overnight.  It was a custom, personally owned piece of labware and should have been sitting with my other small beakers and graduated cylinders on the table next to wbgen2, across from wbgaas.  It is GaAs contaminated and not for general lab use.  I could not label it because it goes into my acid bath.

If you have seen it, could you please let me know?  There's a ziplock bag with my name on it sitting at that table.  Please either write me back by e-mail or drop it in there.

Cheers,

Vijay