etch rate of oxide by HF

Matthieu Lacolle mlacolle at stanford.edu
Wed Jun 9 04:53:18 PDT 2004


Hi,

Does anyone have data about the etch rate of Si-oxide as a function of HF
concentration? I am looking especially in the 10% HF - 30% HF range (not a
buffered solution).

Thanks all,

Matthieu



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