Etch rate of STS PECVD Oxide in 6:1 BOE

Ankur Jain ankurjn at stanford.edu
Wed Dec 7 17:25:45 PST 2005


Hello everyone,
 I am trying to etch a 3000 A thick PECVD oxide layer deposited by the STS
PECVD machine at SNF using 6:1 BOE. Can someone who has done something
similar before give me an idea of the expected etch rate they have observed
using 6:1 BOE, or another HF based etchant?


thanks,

Ankur




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