TMAH question

Onur Kilic okilic at
Thu Mar 17 15:11:25 PST 2005


I am trying to etch Silicon <100> in TMAH with a surface quality as good as

I found in the literature that by adding a very small amount of either
Ammonium Persulfate, or a surfactant called NCW601A (Wako) improves the
surface quality drastically (I believe both are not available in SNF).

Does anyone has experience with these?

Or even better, do you know of a simple receipe that I can use. (Something
like a certain TMAH concentration and stirring etc., or adding IPA e.g.)???



Onur Kilic
PhD Candidate
Applied Physics
Stanford University

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