Etch rate of Al in AL-11 Aluminum Etchant

Ankur Jain ankurjn at stanford.edu
Tue May 2 17:44:13 PDT 2006


Hello all,
 I would like to find out the typical etch rate of thin film Al (around 100
nm) in the Aluminum etchant available at SNF. If you have any numbers from
your experiments, I would appreciate it if you could let me know.

thanks,

Ankur.




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