From harshal at snf.stanford.edu  Fri Aug 22 01:18:10 2003
From: harshal at snf.stanford.edu (harshal at snf.stanford.edu)
Date: Aug 22, 2003 1:18:10 PM
Subject: Shutdown wbmetal 2003-08-22 13:18:07: Report Shutdown for wbmetal
Message-ID: <mailman.76.1357939043.26044.wbmetal-pcs@snf.stanford.edu>

wafer dis-integrated in the drying chamber.



From latta at snf.stanford.edu  Fri Aug 22 01:44:12 2003
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Aug 22, 2003 1:44:12 PM
Subject: Shutdown wbmetal 2003-08-22 13:18:07: Report Clear for wbmetal
Message-ID: <mailman.77.1357939043.26044.wbmetal-pcs@snf.stanford.edu>

Peices rinsed out, ipa swab, ran empty rinse/dry cycle.