From jhaydon at snf.stanford.edu  Fri May  6 09:07:32 2005
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Fri, 6 May 2005 09:07:32 -0700
Subject: Problem wbmetal SNF 2005-04-18 18:14:04: broken wafer
Message-ID: <mailman.123.1357939043.26044.wbmetal-pcs@snf.stanford.edu>




From ajamo at snf.stanford.edu  Mon May 16 20:14:52 2005
From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu)
Date: Mon, 16 May 2005 20:14:52 -0700
Subject: Problem wbmetal SNF 2005-05-16 20:14:51: cathode water cool error
Message-ID: <mailman.124.1357939043.26044.wbmetal-pcs@snf.stanford.edu>

Problem at 100% Al  deposition step.  got  a cathode water cool error .  Eric was around and jiggled some wires and got it going.  Said this was an ongoing problem & new parts were needed.Please fix.



From jhaydon at snf.stanford.edu  Tue May 17 08:43:40 2005
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Tue, 17 May 2005 08:43:40 -0700
Subject: Problem wbmetal SNF 2005-05-16 20:14:51: cathode water cool error
Message-ID: <mailman.125.1357939043.26044.wbmetal-pcs@snf.stanford.edu>

this is really a gryphon problem