From rshyam at snf.stanford.edu Sun Mar 2 06:04:22 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sun, 2 Mar 2008 06:04:22 -0800 Subject: Problem wbmetal SNF 2008-03-02 06:04:21: spindryer Message-ID: the dry time on the spindryer is not enough. i frequently find drops of water on my wafers. i am not able to increase the dry time on the dials as they dont seem to be working properly. From tomada at snf.stanford.edu Mon Mar 3 13:50:05 2008 From: tomada at snf.stanford.edu (tomada at snf.stanford.edu) Date: Mon, 3 Mar 2008 13:50:05 -0800 Subject: Comment wbmetal SNF 2008-03-03 13:50:04: found bench in a "messy" state Message-ID: There are several crystal flakes on and around the BOE bath. The area around the Al etch is full of drops (hopefully water) and some drops of PRX 127 as well. Not nice!!! From mtang at snf.stanford.edu Fri Mar 7 09:19:21 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 7 Mar 2008 09:19:21 -0800 Subject: Comment wbmetal SNF 2008-03-03 13:50:04: found bench in a "messy" state Message-ID: Followed up with previous users. From jhaydon at snf.stanford.edu Mon Mar 10 09:43:00 2008 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 10 Mar 2008 09:43:00 -0700 Subject: Problem wbmetal SNF 2008-03-02 06:04:21: spindryer Message-ID: installed new controller