Problem wbmetal SNF 2010-07-01 05:49:28: al etch tank liquid level
rostam at snf.stanford.edu
rostam at snf.stanford.edu
Thu Jul 1 05:49:29 PDT 2010
i had the al etch tank almost full, however the low liquid level light was on. there are many broken wafer pieces in the tank, too.
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