From jhaydon at snf.stanford.edu  Wed Oct  6 07:08:40 2010
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Wed, 6 Oct 2010 07:08:40 -0700
Subject: Problem wbmetal SNF 2010-09-26 12:25:52: Exhaust reading 0.75
Message-ID: <mailman.315.1357939045.26044.wbmetal-pcs@snf.stanford.edu>

I have ordered a new gauge I think the one on the bench is sticking since it does not seem to fluctuate.



From jcdoll at snf.stanford.edu  Sun Oct 10 12:03:53 2010
From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu)
Date: Sun, 10 Oct 2010 12:03:53 -0700
Subject: Comment wbmetal SNF 2010-10-10 12:03:53: Don't leave baths empty!
Message-ID: <mailman.316.1357939045.26044.wbmetal-pcs@snf.stanford.edu>

When I got to the bench the PRX bath was drained but hadn't been refilled. Don't drain the bath unless you're going to refill it! I'm refilling it now...



From jasmine at snf.stanford.edu  Wed Oct 20 17:46:24 2010
From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu)
Date: Wed, 20 Oct 2010 17:46:24 -0700
Subject: Problem wbmetal SNF 2010-10-20 17:46:24: resistivity takes a very long  to reach 16 on the spin dryer
Message-ID: <mailman.317.1357939045.26044.wbmetal-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Tue Oct 26 08:58:45 2010
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Tue, 26 Oct 2010 08:58:45 -0700
Subject: Problem wbmetal SNF 2010-10-20 17:46:24: resistivity takes a very long  to reach 16 on the spin dryer
Message-ID: <mailman.318.1357939045.26044.wbmetal-pcs@snf.stanford.edu>

tested two times was able to achive 17.9  megohms both times. Problem is most likely  wafer or casset.



From yeh at snf.stanford.edu  Wed Oct 27 12:55:19 2010
From: yeh at snf.stanford.edu (yeh at snf.stanford.edu)
Date: Wed, 27 Oct 2010 12:55:19 -0700
Subject: Problem wbmetal SNF 2010-10-27 12:55:18: spin dryer leaving water on wafers
Message-ID: <mailman.319.1357939045.26044.wbmetal-pcs@snf.stanford.edu>




From jcdoll at snf.stanford.edu  Sat Oct 30 13:47:38 2010
From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu)
Date: Sat, 30 Oct 2010 13:47:38 -0700
Subject: Comment wbmetal SNF 2010-10-30 13:47:36: dry RPM low?
Message-ID: <mailman.320.1357939045.26044.wbmetal-pcs@snf.stanford.edu>

as reported by user yeh, wafers are wet coming out of the SRD. it seems like the dry speed may have been reduced by someone - the vibration during the dry cycle is less but wafers aren't getting dry.