Comment wbmetal SNF 2010-10-30 13:47:36: dry RPM low?

jcdoll at snf.stanford.edu jcdoll at snf.stanford.edu
Sat Oct 30 13:47:38 PDT 2010


as reported by user yeh, wafers are wet coming out of the SRD. it seems like the dry speed may have been reduced by someone - the vibration during the dry cycle is less but wafers aren't getting dry.




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