Problem wbmetal SNF 2012-08-01 15:55:50: wafer broke in SRD

amoini at snf.stanford.edu amoini at snf.stanford.edu
Wed Aug 1 15:55:50 PDT 2012


Can we please take a serious look at the SRD to fix the teflon bars? One of my wafers stuck to the bars, as *several* users have already mentioned, and broke. This was a precious process wafer. What are our other options for SRDs? Can we use the bottom one? The current SRD (top one) seems unusable if breaking wafers is a possibility.




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