From uli at snf.stanford.edu Fri Feb 17 15:02:48 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 17 Feb 2012 15:02:48 -0800 Subject: Problem wbmetal SNF 2012-02-17 15:02:47: Aluminum etch bath does not heat Message-ID: From uli at snf.stanford.edu Fri Feb 17 15:03:12 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 17 Feb 2012 15:03:12 -0800 Subject: Problem wbmetal SNF 2012-02-17 15:03:12: PRX127 bath drains very slow Message-ID: From uli at snf.stanford.edu Fri Feb 17 15:05:26 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 17 Feb 2012 15:05:26 -0800 Subject: Problem wbmetal SNF 2012-02-17 15:05:25: PRS1000 bath LowLiquid alarm on. Message-ID: Bath is filled up with liquid but the LowLiquid Level alarm stays on. From uli at snf.stanford.edu Tue Feb 21 11:12:38 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 21 Feb 2012 11:12:38 -0800 Subject: Shutdown wbmetal SNF 2011-12-13 13:55:30: Message-ID: From uli at snf.stanford.edu Tue Feb 21 11:13:08 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 21 Feb 2012 11:13:08 -0800 Subject: Comment wbmetal SNF 2011-11-30 15:20:04: white residue around the BOE bath Message-ID: To the archives. From uli at snf.stanford.edu Tue Feb 21 11:13:20 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 21 Feb 2012 11:13:20 -0800 Subject: Comment wbmetal SNF 2011-11-18 16:07:47: N2 gun whistles upon release Message-ID: To the archives. From uli at snf.stanford.edu Tue Feb 21 11:13:30 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 21 Feb 2012 11:13:30 -0800 Subject: Comment wbmetal SNF 2011-11-15 19:06:47: noisy when dry the wafer Message-ID: To the archives. From jhaydon at snf.stanford.edu Wed Feb 22 07:03:21 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 22 Feb 2012 07:03:21 -0800 Subject: Problem wbmetal SNF 2012-02-17 15:02:47: Aluminum etch bath does not heat Message-ID: heating now switch was turned off From jhaydon at snf.stanford.edu Wed Feb 22 07:18:53 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 22 Feb 2012 07:18:53 -0800 Subject: Problem wbmetal SNF 2012-02-17 15:03:12: PRX127 bath drains very slow Message-ID: constriction in drain line draining faster now From jhaydon at snf.stanford.edu Wed Feb 22 07:19:12 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 22 Feb 2012 07:19:12 -0800 Subject: Problem wbmetal SNF 2012-02-17 15:05:25: PRS1000 bath LowLiquid alarm on. Message-ID: reploaced level switch From uli at snf.stanford.edu Wed Feb 22 15:32:50 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Wed, 22 Feb 2012 15:32:50 -0800 Subject: Comment wbmetal SNF 2011-11-15 03:57:45: PRS-1000 console acting weird Message-ID: To the archives From popomoo at snf.stanford.edu Tue Feb 28 09:24:23 2012 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Tue, 28 Feb 2012 09:24:23 -0800 Subject: Problem wbmetal SNF 2012-02-28 09:24:22: high frequency noice comes out Message-ID: now, it makes a high frequency noise, and no one uses it. From uli at snf.stanford.edu Tue Feb 28 10:05:26 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 28 Feb 2012 10:05:26 -0800 Subject: Problem wbmetal SNF 2012-02-28 09:24:22: high frequency noice comes out Message-ID: fixed, N2 gun was making this funny noice