From ylyang at snf.stanford.edu Fri Jun 1 13:38:56 2012 From: ylyang at snf.stanford.edu (ylyang at snf.stanford.edu) Date: Fri, 1 Jun 2012 13:38:56 -0700 Subject: Problem wbmetal SNF 2012-06-01 13:38:55: SRD program changed Message-ID: I think someone changed the SRD program. Please check it. Tahnks From uli at snf.stanford.edu Mon Jun 4 14:04:16 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Mon, 4 Jun 2012 14:04:16 -0700 Subject: Problem wbmetal SNF 2012-06-01 13:38:55: SRD program changed Message-ID: Checked. From mcherry at snf.stanford.edu Tue Jun 5 10:56:04 2012 From: mcherry at snf.stanford.edu (mcherry at snf.stanford.edu) Date: Tue, 5 Jun 2012 10:56:04 -0700 Subject: Problem wbmetal SNF 2012-06-05 10:56:04: SRD Door Locked Shut Message-ID: SRD Door will not open. Shutting power off and on again changes nothing. From jhaydon at snf.stanford.edu Tue Jun 5 12:18:21 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 5 Jun 2012 12:18:21 -0700 Subject: Problem wbmetal SNF 2012-06-05 10:56:04: SRD Door Locked Shut Message-ID: door fixed From bchui at snf.stanford.edu Tue Jun 12 18:00:10 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Tue, 12 Jun 2012 18:00:10 -0700 Subject: Problem wbmetal SNF 2012-06-12 18:00:09: Cassette fits too tight after drying cycle Message-ID: Due to heating and expansion of teflon cassette and the two teflon caging rods. Wafers are pushed tight against the rods. In fact, I broke one wafer trying to remove the cassette even after cool down. From uli at snf.stanford.edu Wed Jun 20 16:18:08 2012 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Wed, 20 Jun 2012 16:18:08 -0700 Subject: Problem wbmetal SNF 2012-06-12 18:00:09: Cassette fits too tight after drying cycle Message-ID: The user is processing bonded wafers, they could be a little bit larger than regular wafers. We are going to write a recipe for his wafers. From shott at snf.stanford.edu Sat Jun 23 07:29:11 2012 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 23 Jun 2012 07:29:11 -0700 Subject: Shutdown wbmetal SNF 2012-06-23 07:29:11: No scrubbed exhaust ... Message-ID: Shutting down tools will building scrubber is cleaned ... John and Mary From mtang at snf.stanford.edu Sat Jun 23 07:52:31 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sat, 23 Jun 2012 07:52:31 -0700 Subject: Shutdown wbmetal SNF 2012-06-23 07:29:11: No scrubbed exhaust ... Message-ID: From mtang at snf.stanford.edu Sat Jun 23 07:56:29 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sat, 23 Jun 2012 07:56:29 -0700 Subject: Comment wbmetal SNF 2012-06-23 07:56:29: Needs new chemicals Message-ID: Chemicals drained for scrubber exhaust maintenance. Make sure the PRS1000 and PRX127 baths are dry before adding new chemical. Alternatively, rinse with a little chemical and drain several times before filling (trace water will make these chemicals strongly basic.)