Problem wbmetal SNF 2012-06-12 18:00:09: Cassette fits too tight after drying cycle

bchui at snf.stanford.edu bchui at snf.stanford.edu
Tue Jun 12 18:00:10 PDT 2012


Due to heating and expansion of teflon cassette and the two teflon caging rods.  Wafers are pushed tight against the rods. In fact, I broke one wafer trying to remove the cassette even after cool down.




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