From amol at stanford.edu  Sun Apr 16 13:12:51 2000
From: amol at stanford.edu (Amol Ramesh Joshi)
Date: Sun, 16 Apr 2000 13:12:51 -0700 (PDT)
Subject: wbmetal/wbnitride spin dryer
Message-ID: <Pine.GSO.4.21.0004161253590.25958-100000@elaine19.Stanford.EDU>



	Hi all,

	Today I found a notice on wbmetal saying 'Use spin dryer at
wbnitride'. The notice is NOT signed by anyone. So I am removing it to
prevent further misuse/contamination of wbnitride spin dryer. SNF webpage
shows that wbnitride is NOT among the list of equipment allowed after
using wbmetal. Using wbnitride spin dryer might be a special case but I
wonder why is the notice not signed by a staff member. What about metal
contamination of wbnitride?

	Thanks,

	- Amol



From latta at snf.stanford.edu  Mon Apr 17 10:53:13 2000
From: latta at snf.stanford.edu (Nancy Latta)
Date: Mon, 17 Apr 2000 10:53:13 -0700 (PDT)
Subject: Using the wbnitride spin dryer
Message-ID: <Pine.LNX.4.04.10004171046330.20704-100000@snf.stanford.edu>

Folks,

I am the person who originally posted the message about using the
wbnitride spin dryer for wbmetal work.  If you are going to use the
wbnitride spin dryer for wafers sensitive to metal contamination, it is
highly recommended that you run the dryer with an empty cassette in it for
a full rinse/dry cycle.

The thinking is that this is not a heated process and any work going into
a metal-free mainline piece of equipment will go though the full pre-diff
clean (including the HCl/H2O2 step).  The rinsing of the dryter with fresh
DI is to clean it out even further.

Sorry for any confusion caused by the signage,

				Nancy