From ehkim at stanford.edu  Thu Jul 12 15:37:46 2001
From: ehkim at stanford.edu (Eun-Ha Kim)
Date: Thu, 12 Jul 2001 15:37:46 -0700
Subject: titanium etch in metal wetbench
Message-ID: <002701c10b23$45b75c10$316340ab@EUN>

Hello,

If anyone has etched titanium in the bath of NH4OH+H2O2+H2O in metal wetbench, what could be the approximate titanium etch rate ? would 1um-thick standard resist survive after etching thin(<500A) titanium there ? Any information on this matter would be greatly appreciated. 
______________________________

Yours truly,
Eun-Ha Kim      
 
CISX Building,  Rm 300
Stanford University
Stanford, CA 94305
Phone : (650) 725-0419
Email  : ehkim at stanford.edu
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