titanium etch in metal wetbench

Eun-Ha Kim ehkim at stanford.edu
Thu Jul 12 15:37:46 PDT 2001


If anyone has etched titanium in the bath of NH4OH+H2O2+H2O in metal wetbench, what could be the approximate titanium etch rate ? would 1um-thick standard resist survive after etching thin(<500A) titanium there ? Any information on this matter would be greatly appreciated. 

Yours truly,
Eun-Ha Kim      
CISX Building,  Rm 300
Stanford University
Stanford, CA 94305
Phone : (650) 725-0419
Email  : ehkim at stanford.edu
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