Etch oxide on germanium film

Eun-Ha Kim ehkim at stanford.edu
Thu Sep 20 17:08:01 PDT 2001


Hi all,
I am hoping to strip off LTO, which is on top of the 1000A-thick germanium
film on silicon wafer. I am just wondering if germanium will be okay in HF
while removing LTO. Any information on this will be appreciated.
 ______________________________

Yours truly,
Eun-Ha Kim

CISX Building,  Rm 300
Stanford University
Stanford, CA 94305
Phone : (650) 725-0419
Email  : ehkim at stanford.edu




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