From uli at snf.stanford.edu  Mon Jan 26 16:06:47 2004
From: uli at snf.stanford.edu (Uli Thumser)
Date: Mon, 26 Jan 2004 16:06:47 -0800
Subject: DI water at overflow rinse tank should be off
Message-ID: <4015AB97.5ABF5291@snf.stanford.edu>

Wbmetal users:

when I came in this morning, the DI water at the overflow rinse tank was
still running.

"If you are using the overflow rinse tank (for wetting wafers prior to
Al Etch), press the "DI Fill" button on the control panel. This will
start water flowing in this tank. Once removing your wafers, remember to
press the "Di Fill" button again to turn off the water flow."
http://snf.stanford.edu/Equipment/wbmetal/Operation.html

Thank you,
Uli
--
Uli Thumser
Stanford Nanofabrication Facility
Center for Integrated Systems
420 Via Palou Mall, CIS Room 146
Stanford, CA  94305
(650)725-3694
uli at snf.stanford.edu