DI water at overflow rinse tank should be off

Uli Thumser uli at snf.stanford.edu
Mon Jan 26 16:06:47 PST 2004

Wbmetal users:

when I came in this morning, the DI water at the overflow rinse tank was
still running.

"If you are using the overflow rinse tank (for wetting wafers prior to
Al Etch), press the "DI Fill" button on the control panel. This will
start water flowing in this tank. Once removing your wafers, remember to
press the "Di Fill" button again to turn off the water flow."

Thank you,
Uli Thumser
Stanford Nanofabrication Facility
Center for Integrated Systems
420 Via Palou Mall, CIS Room 146
Stanford, CA  94305
uli at snf.stanford.edu

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