From phimmer at snf.stanford.edu  Wed Mar 17 11:59:32 2004
From: phimmer at snf.stanford.edu (phillip himmer)
Date: Wed, 17 Mar 2004 11:59:32 -0800
Subject: ti etch
Message-ID: <9BC4A0E2-784D-11D8-ADBF-000A95AC943C@snf.stanford.edu>

Hello

I want to etch a titanium layer overlying an aluminum layer.
Does anyone know if the Ti etch, using ammonium hydroxide recipe that 
SNF uses, will etch aluminum or roughen the aluminum surface?
Any thoughts are appreciated.

thanks
phil