ti etch

phillip himmer phimmer at snf.stanford.edu
Wed Mar 17 11:59:32 PST 2004


Hello

I want to etch a titanium layer overlying an aluminum layer.
Does anyone know if the Ti etch, using ammonium hydroxide recipe that 
SNF uses, will etch aluminum or roughen the aluminum surface?
Any thoughts are appreciated.

thanks
phil




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