From aeonia at stanford.edu  Fri Dec  9 16:05:42 2005
From: aeonia at stanford.edu (Hyeun-su Kim)
Date: Fri,  9 Dec 2005 16:05:42 -0800
Subject: Pad etch ecth rate?
Message-ID: <1134173142.439a1bd676f92@webmail>



Dear wbmetal users,

I am thinking about using pad etch etchant to etch some oxide and expose
aluminum underneath. Does anybody know its etch rate for the LTO and
thermal oxide? I will do some tests tonight or tomorrow but I like to have
some information before that. Thank you in advance.

Regards,
Hyeun-su (aeonia)