LTO wet etch rate

Arash Hazeghi ahazeghi at
Mon Nov 7 16:08:28 PST 2005

I have some W wafers with ~2600A LTO 400 with normal 1um resist, I want to
etch LTO for ~2um using 6:1 or 20:1 Buff HF, does anyone know the etch rate
and PR/Oxide Oxide/W selectivity for Wbmetal?


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