W wet etch

Arash Hazeghi ahazeghi at stanford.edu
Thu Sep 22 13:49:40 PDT 2005

Next message: Particle Problem - or - Randy True is the SNF Labmember-of-the-month!
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Hi,

Does anyone know what is the best way to etch W without harming the 
resist? I have been told to use H2O2 but I'm not sure if the resist 
would stand it? W is about 1um.

Thanks a lot,
Arash

Next message: Particle Problem - or - Randy True is the SNF Labmember-of-the-month!
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the wbmetal mailing list