W wet etch

Arash Hazeghi ahazeghi at stanford.edu
Thu Sep 22 13:49:40 PDT 2005


Hi,

Does anyone know what is the best way to etch W without harming the 
resist? I have been told to use H2O2 but I'm not sure if the resist 
would stand it? W is about 1um.

Thanks a lot,
Arash




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