Question about Ti wet etch rate

cursive at ee.ucla.edu cursive at ee.ucla.edu
Sun Dec 5 18:15:35 PST 2010


Hi all,

Does anyone use the metal wet bench for Titanium(from Gryphon) wet etch?

Can anyone tell me the recipe and etch rate?

I appreciate your help.

Thanks and regards,

Hsu-Yu




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